| General Procedures |
Clean Room Gowning Procedures |
PPT|PDF |
| |
Procedure - Orbital Tube Welder PP
format |
PPT|PDF |
| |
Procedure - DI Water |
DOC |
| |
|
|
| Cleaning |
Procedure -Single Wager Piranha Clean-
single page |
DOCx|PDF |
| |
|
|
| Photolithography |
Headway Spin Coater with PWM32
Controller |
PDF |
| |
|
|
| |
Using POSITIVE photoresist |
|
| |
Photolithography Microposit
1813 Positive PR |
|
| |
+ 354 Positive PR Developer |
DOC|PDF |
| |
Solitec High Speed Spin Processor |
DOC|PDF |
| |
HTG Mask Aligner |
DOC|PDF |
| |
Solitec Spray Developer
+ Microposit 354
Positive PR Developer |
DOC|PDF |
| |
Photoresist Strip Procedure
for Microposit 1813 Positive PR |
DOC|PDF |
| |
|
|
| |
Using NEGATIVE photoresist |
|
| |
NFR-016 Negative PR Liftoff
Process |
DOC|PDF |
| |
NFR-014 Negative PR Vertical Wall
Process |
DOC|PDF |
| |
Photolithography Negative PR &
Negative PR Developer* |
DOC|PDF |
| |
Solitec High Speed Spin Processor |
DOC|PDF |
| |
HTG Mask Aligner |
DOC|PDF |
| |
Solitec Spray Developer with
Negative PR Developer* |
DOC|PDF |
| |
Photoresist Strip Procedure
for Negative PR* |
DOC|PDF |
| |
* [PENDING] |
|
| |
|
|
| Etching |
Photoresist stripping using O2
plasma |
DOC|PDF |
| |
Anisotropic Etch |
PDF |
| |
Efficient process development for
bulk Si etching using |
|
| |
cellular automata simulation
techniques |
PDF |
| |
Silicon Etching |
PDF |
| |
KOH Etching and Decontamination
Procedures |
DOC|PDF |
| |
Bulk Micromachining |
DOC|PDF |
| |
Recipe for silicon mask etching |
DOC|PDF |
| |
|
|
| Thin Film Deposition |
CVC Sputter Tool (DC sputtering of
Aluminum films) |
DOC|PDF |
| |
CVC Sputter Tool (RF sputtering) |
DOC|PDF |
| |
AJA Sputter Tool (For depositing
metal films) |
DOC|PDF |
| |
Varian 3125 - Procedure for e-beam
evaporation in auto-mode |
DOC|PDF |
| |
Schematic - Sputtering of thin films |
JPG|TIF |
| |
Schematic - E-Beam evaporation of
thin films |
JPG|TIF |
| |
|
|
| Metrology |
Alpha Step Tool |
DOC|PDF |
| |
Filmetrics F20 Thin-Film Analyzer |
DOC |
| |
Procedure - 4 point probe using Keithley Pro-4.ppt |
PPT |
| |
|
|
| Wafer Cutting |
Micro Automation (Wafer Dicing Saw) |
DOC|PDF |
| |
|
|
| DC Testing |
PN-Junction DC Measurement |
DOC|PDF |
| |
|
|
| Thermal Processing |
AG 210 RTP |
DOC|PDF |
College of Engineering
